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Effect of RuO2 growth temperature on ferroelectric properties of RuO2/Pb(Zr,Ti)O3/RuO2/Pt capacitors

dc.contributor.authorNorga, Gerd
dc.contributor.authorFè, Laura
dc.contributor.authorWouters, Dirk
dc.contributor.authorMaes, Herman
dc.date.accessioned2021-10-14T13:29:16Z
dc.date.available2021-10-14T13:29:16Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4628
dc.sourceIIOimport
dc.titleEffect of RuO2 growth temperature on ferroelectric properties of RuO2/Pb(Zr,Ti)O3/RuO2/Pt capacitors
dc.typeJournal article
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1318
dc.source.endpage1320
dc.source.journalApplied Physics Letters
dc.source.issue10
dc.source.volume76
imec.availabilityPublished - open access


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