Browsing Articles by imec author "187beec6129b2b8c842a0a80ab643a1f75895fbf"
Now showing items 1-3 of 3
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APT tip shape modifications during analysis, its implications, and the potential to measure tip shapes in real time via soft-X-ray ptychography
van der Heide, Paul; Makhotkin, Igor; Vandervorst, Wilfried; Fleischmann, Claudia (2019) -
Opportunities and challenges in APT metrology for semiconductor applications
Fleischmann, Claudia; Cuduvally, Ramya; Morris, Richard; Melkonyan, Davit; Op de Beeck, Jonathan; Makhotkin, Igor; van der Heide, Paul; Vandervorst, Wilfried (2019) -
Refined extreme ultraviolet mask stack model
Makhotkin, Igor; Wu, Meiyi; Soltwisch, V.; Scholze, F.; Philipsen, Vicky (2021)