Browsing Articles by imec author "ccce2c03fca7602a539a8da27089ef0bceee4f90"
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Low temperature selective growth of heavily boron-doped germanium source /drain layers for advanced pMOS devices
Porret, Clément; Vohra, Anurag; Nakazaki, Nobuya; Hikavyy, Andriy; Douhard, Bastien; Meersschaut, Johan; Bogdanowicz, Janusz; Rosseel, Erik; Pourtois, Geoffrey; Langer, Robert; Loo, Roger (2020)