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Mit zwei Chips optimale Kammern bauen

dc.contributor.authorVan Bavel, Mieke
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-14T23:28:16Z
dc.date.available2021-10-14T23:28:16Z
dc.date.issued2002-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6909
dc.sourceIIOimport
dc.titleMit zwei Chips optimale Kammern bauen
dc.typeJournal article
dc.contributor.imecauthorVan Bavel, Mieke
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage38
dc.source.endpage39
dc.source.journalElektronik Produktion & Prüftechnik
dc.source.issue10
imec.availabilityPublished - imec


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