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Leakage optimization of ultra-shallow junctions formed by solid phase epitaxial regrowth

dc.contributor.authorLindsay, Richard
dc.contributor.authorHenson, Kirklen
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorMaex, Karen
dc.contributor.authorPawlak, Bartek
dc.contributor.authorDuffy, Ray
dc.contributor.authorSurdeanu, Radu
dc.contributor.authorStolk, Peter
dc.contributor.authorKittl, Jorge
dc.contributor.authorGiangrandi, Simone
dc.contributor.authorPagès, Xavier
dc.contributor.authorVan der Jeugd, Kees
dc.date.accessioned2021-10-15T14:28:30Z
dc.date.available2021-10-15T14:28:30Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9205
dc.sourceIIOimport
dc.titleLeakage optimization of ultra-shallow junctions formed by solid phase epitaxial regrowth
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorMaex, Karen
dc.contributor.imecauthorPawlak, Bartek
dc.contributor.imecauthorVan der Jeugd, Kees
dc.source.peerreviewno
dc.source.beginpage306
dc.source.endpage311
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue1
dc.source.volume22
imec.availabilityPublished - imec


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