Browsing by author "Jen, Wei-Lun"

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Fluorinated polymethacrylates as highly sensitive non-chemically amplified e-beam resists

Straham, Jeffrey; Adams, Jacob; Jen, Wei-Lun; Vanleenhove, Anja; Neikirk, Colin; Rochelle, Timothy; Gronheid, Roel; Willson, Grant (2009)
Fluorinated polymethacrylates as highly sensitive nonchemically amplified e-beam resists

Strahan, Jeffrey R.; Adams, Jacob R.; Jen, Wei-Lun; Vanleenhove, Anja; Neikirk, Colin C.; Rochelle, Timothy; Gronheid, Roel; Willson, C. Grant (2009)