Browsing by author "O'Neill, A"
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Synchrotron measurement of the effect of dielectric porosity and air gaps on the stress in advanced Cu/low-k interconnects
Wilson, Chris; Zhao, Chao; Zhao, Larry; Tokei, Zsolt; Croes, Kristof; Pantouvaki, Marianna; Beyer, Gerald; Horsfall, A; O'Neill, A (2009)