Browsing by author "Watanabe, Hisashi"
Now showing items 1-1 of 1
-
Mask enhancer technology for 45-nm node contact hole fabrication
Yuito, Takashi; Wiaux, Vincent; Van Look, Lieve; Vandenberghe, Geert; Irie, Shigeo; Matsuo, Takahiro; Misaka, Akio; Watanabe, Hisashi; Sasago, Masru (2005)