Browsing by author "Nakashima, A."
Now showing items 1-2 of 2
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Comparative study of pore size of low-dielectric-constant porous spin-on-glass films using different methods of nondestructive instrumentation
Kondoh, Eiichi; Baklanov, Mikhaïl; Lin, E.; Gidley, D.; Nakashima, A. (2001) -
Non-destructive determination of pore size distribution of low-k porous SOG films
Baklanov, Mikhaïl; Kondoh, Eiichi; Gidley, D.; Lin, E.; Wu, Wen; Arao, H.; Mogilnikov, K. P.; Shamiryan, Denis; Nakashima, A. (2000)