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Non-destructive determination of pore size distribution of low-k porous SOG films
Publication:
Non-destructive determination of pore size distribution of low-k porous SOG films
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Date
2000
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Baklanov, Mikhaïl
;
Kondoh, Eiichi
;
Gidley, D.
;
Lin, E.
;
Wu, Wen
;
Arao, H.
;
Mogilnikov, K. P.
;
Shamiryan, Denis
;
Nakashima, A.
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Acq. date: 2026-04-27
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Views
2029
since deposited on 2021-10-14
2
last month
1
last week
Acq. date: 2026-04-27
Citations