Non-destructive determination of pore size distribution of low-k porous SOG films

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Authors
Baklanov, Mikhaïl; Kondoh, Eiichi; Gidley, D.; Lin, E.; Wu, Wen; Arao, H.; Mogilnikov, K. P.; Shamiryan, Denis; Nakashima, A.
Conference
60th Japan Society of Applied Physics Autumn Meeting; September 2000; Japan.
Title
Non-destructive determination of pore size distribution of low-k porous SOG films
Publication type
Oral presentation
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