Publication:
Non-destructive determination of pore size distribution of low-k porous SOG films
Date
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Kondoh, Eiichi | |
| dc.contributor.author | Gidley, D. | |
| dc.contributor.author | Lin, E. | |
| dc.contributor.author | Wu, Wen | |
| dc.contributor.author | Arao, H. | |
| dc.contributor.author | Mogilnikov, K. P. | |
| dc.contributor.author | Shamiryan, Denis | |
| dc.contributor.author | Nakashima, A. | |
| dc.date.accessioned | 2021-10-14T12:40:09Z | |
| dc.date.available | 2021-10-14T12:40:09Z | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4088 | |
| dc.source.conference | 60th Japan Society of Applied Physics Autumn Meeting; September 2000; Japan. | |
| dc.source.conferencelocation | ||
| dc.title | Non-destructive determination of pore size distribution of low-k porous SOG films | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |