Browsing by author "Nam, Jaewoo"
Now showing items 1-2 of 2
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Manufacturability of dense hole arrays with directed self-assembly using the CHIPS flow
Singh, Arjun; Nam, Jaewoo; Lee, Jongsu; Chan, BT; Wu, Hengpeng; Yin, Jian; Cao, Yi; Gronheid, Roel (2016) -
Understanding defects in CHIPS flow hexagonal arrays and strategies for improvement
Singh, Arjun; Lee, Jongsu; Nam, Jaewoo; Chan, BT; Gronheid, Roel (2016)