Browsing by author "Ganesan, Ramakrishnan"

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Patterning at the Resolution Limit of Commercial Electron Beam Lithography

Saifullah, Mohammad S. M.; Asbahi, Mohamed; Neo, Darren C. J.; Mahfoud, Zackaria; Tan, Hui Ru; Ha, Son Tung; Dwivedi, Neeraj; Dutta, Tanmay; bin Dolmanan, Surani; Aabdin, Zainul; Bosman, Michel; Ganesan, Ramakrishnan; Tripathy, Sudhiranjan; Hasko, David G.; Valiyaveettil, Suresh (2022)