Browsing by author "Döbeli, M."
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Characterization of ultra thin oxynitrides: a general approach
Brijs, Bert; Deleu, Jeroen; Conard, Thierry; De Witte, Hilde; Vandervorst, Wilfried; Nakajima, K.; Kimura, K.; Genchev, I.; Bermaier, A.; Goergens, L.; Neumaier, P.; Dollinger, G.; Döbeli, M. (2000)