Browsing by author "Mulders, A. M."
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Sub-0.25 micron lithography applying illumination pupil filtering (quadrupole) on a DUV step-and-repeat system
Finders, Jo; Mulders, A. M.; Krist, J.; Flagello, D.; Luehrmann, P.; Maenhoudt, Mireille; Marschner, Thomas; De Bisschop, Peter; Ronse, Kurt (1998)