Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Conference contributions
View item
imec Publications Repository
imec Publications
Conference contributions
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Sub-0.25 micron lithography applying illumination pupil filtering (quadrupole) on a DUV step-and-repeat system
View/
open
2672.pdf (1.211Mb)
Metadata
Show full item record
Authors
Finders, Jo
;
Mulders, A. M.
;
Krist, J.
;
Flagello, D.
;
Luehrmann, P.
;
Maenhoudt, Mireille
;
Marschner, Thomas
;
De Bisschop, Peter
;
Ronse, Kurt
Conference
OLIN Microlithography Symposium. Interface '98
Title
Sub-0.25 micron lithography applying illumination pupil filtering (quadrupole) on a DUV step-and-repeat system
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections
Conference contributions
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login