Browsing by author "Chen, Zhijin"

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    • EUV based multi-patterning schemes for advanced DRAM nodes 

      Das, Sayantan; Sah, Kaushik; Fallica, Roberto; Chen, Zhijin; Halder, Sandip; Cross, Andrew; De Simone, Danilo; Treska, Fergo; Leray, Philippe; Kim, Ryan Ryoung han; Maguire, Ethan; Wei, Chih-, I; Fenger, Germain; Lafferty, Neal; Lee, Jeonghoon (2022)

    • Hotspot discovery and variability analysis for advanced EUV processes 

      Sah, Kaushik; Chen, Zhijin; Zhang, Yao; Zhang, Liming; Zhang, Cao; Higgins, Craig; Burov, Anatoly; Parsey, Guy; Vukkadala, Pradeep; Gronheid, Roel; Jain, Arpit; Ramini, Ramakanth; Agrawal, Ankur; Sharma, Garima; Cross, Andrew; Roy, Syamashree; Blanco, Victor (2024)