Browsing by author "Cockburn, A"

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Influence of ultra low-k material properties on post direct CMP damage

Sinapi, Fabrice; Travaly, Youssef; Heylen, Nancy; Vereecke, Guy; Baklanov, Mikhaïl; Hernandez, Jose Luis; Beyer, Gerald; Lytle, S; Fischer, P; Cockburn, A; Santoro, G; Nguyen, O (2007)