Browsing by author "Shamma, Nader"

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Integrated approach to improving local CD uniformity in EUV patterning

Liang, Andrew; Hermans, Jan; Tran, Tim; Viatkina, Katja; Liang, Chen-Wei; Ward, Brandon; Chuang, Steven; Yu, Jengyi; Harm, Greg; Vandereyken, Jelle; Rio, David; Kubis, Michael; Tan, Samantha; Wise, Rich; Dusa, Mircea; Reddy, Sirish; Singhal, Akhil; Van Schravendijk, Bart; Dixit, Girish; Shamma, Nader (2017)
Overlay Metrology Performance of Dry Photoresist Towards High NA EUV Lithography

Canga, Eren; Blanco, Victor; Charley, Anne-Laure; Tabery, Cyrus; Zacca, Gabriel; Shamma, Nader; Kam, Benjamin; Brouri, Mohand (2024)