Publication:

Integrated approach to improving local CD uniformity in EUV patterning

Date

2017
Proceedings Paper
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Author(s)

Liang, Andrew
;
Hermans, Jan  
;
Tran, Tim
;
Viatkina, Katja
;
Liang, Chen-Wei
;
Ward, Brandon
;
Chuang, Steven
;
Yu, Jengyi
;
Harm, Greg
;
Vandereyken, Jelle  
;
Rio, David  
;
Kubis, Michael
;
Tan, Samantha
;
Wise, Rich
;
Dusa, Mircea  
;
Reddy, Sirish
;
Singhal, Akhil
;
Van Schravendijk, Bart
;
Dixit, Girish  
;
Shamma, Nader

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