Browsing by author "Fischer, F."
Now showing items 1-3 of 3
-
New low-stress PECVD Poly-SiGe layers for MEMS
Rusu, Cristina; Sedky, S.; Parmentier, Brigitte; Verbist, Agnes; Richard, Olivier; Brijs, Bert; Geenen, Luc; Witvrouw, Ann; Lärmer, F.; Fischer, F.; Kronmüller, S.; Leca, V.; Otter, B. (2003) -
Stable thin film encapsulation of acceleration sensors using polycrystalline silicon as sacrificial and encapsulation layer
Hoechst, A.; Scheuerer, R.; Stahl, H.; Fischer, F.; Metzger, L.; Reichenbach, R.; Laermer, F.; Kronmueller, S.; Watcham, S.; Rusu, Cristina; Witvrouw, Ann; Gunn, R. (2004) -
Thin film encapsulation of acceleration sensors using polysilicon sacrificial layers
Stahl, H.; Hoechst, A.; Fischer, F.; Metzger, L.; Reichenbach, R.; Laermer, F.; Kronmueller, S.; Breitschwerdt, K.; Gunn, R.; Watcham, S.; Rusu, Cristina; Witvrouw, Ann (2003)