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Stable thin film encapsulation of acceleration sensors using polycrystalline silicon as sacrificial and encapsulation layer
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Authors
Hoechst, A.
;
Scheuerer, R.
;
Stahl, H.
;
Fischer, F.
;
Metzger, L.
;
Reichenbach, R.
;
Laermer, F.
;
Kronmueller, S.
;
Watcham, S.
;
Rusu, Cristina
;
Witvrouw, Ann
;
Gunn, R.
Issue
2_3
Journal
Sensors and Actuators A
Volume
114
Title
Stable thin film encapsulation of acceleration sensors using polycrystalline silicon as sacrificial and encapsulation layer
Publication type
Journal article
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