Browsing by author "Compen, R."
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The impact of backside particles on the limits of optical lithography
Bearda, Twan; Mertens, Paul; Holsteyns, Frank; De Bisschop, Peter; Compen, R.; van Meer, R.; Heyns, Marc (2004) -
The impact of backside particles on the limits of optical lithography
Bearda, Twan; Mertens, Paul; Holsteyns, Frank; De Bisschop, Peter; Compen, R.; van Meer, A.; Heyns, Marc (2005)