Browsing by author "Shoval, Lior"

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EUV mask defectivity study by existing DUV tools and new EBEAM technology

Mangan, Shmoolik; Jonckheere, Rik; Van Den Heuvel, Dieter; Rozentsvige, Moshe; Kudriashov, Vladislav; Shoval, Lior; Santoro, Gaetano; Englard, Ilan (2010)
Improvements of multi-layer defect mapping with advanced inspection technology

Aharonson, Israel; Shoval, Lior; Wolf, Staud; Levesque, Shawn; Nitzan, Tobous; Englard, Ilan; Jonckheere, Rik; Van Den Heuvel, Dieter (2012)