Browsing by author "Elliott, K."

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A comparison of spike, flash, SPER and laser annealing for 45nm CMOS

Lindsay, Richard; Pawlak, Bartek; Kittl, Jorge; Henson, Kirklen; Torregiani, Cristina; Giangrandi, Simone; Surdeanu, Radu; Vandervorst, Wilfried; Mayur, A.; Ross, J.; McCoy, S.; Gelpey, J.; Elliott, K.; Pagès, Xavier; Satta, Alessandra; Lauwers, Anne; Stolk, P.; Maex, Karen (2003)
Device characteristics of ultra-shallow junctions formed by fRTP annealing

Satta, Alessandra; Lindsay, Richard; Severi, Simone; Henson, Kirklen; Maex, Karen; McCoy, S.; Gelpey, J.; Elliott, K. (2004)