Browsing by author "Olsen, C."

Now showing items 1-1 of 1

Plasma nitridation optimization sub-15A gate dielectrics

Cubaynes, Florence; Schmitz, Jurriaan; van der marel, C.; Snijders, H.; Veloso, Anabela; Rothschild, Aude; Olsen, C.; Date, Lucien (2003)