Browsing by author "Kazinczi, Robert"

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Performance of FlexRay, a fully programmable illumination system for generation of freeform sources on high NA immersion systems

Mulder, Melchior; Engelen, Andre; Noordman, Oscar; Streutker, Gert; van Drieenhuizen, Bert; van Nuenen, Cas; Endendijk, Wilfred; Verbeeck, Jef; Bouman, Wim; Bouma, Anita; Kazinczi, Robert; Socha, Robert; Juergens, Dirk; Zimmermann, Joerg; Trauter, Bastian; Bekaert, Joost; Laenens, Bart; Corliss, Daniel; McIntyre, Greg (2010)