Browsing by author "Höchbauer, T."
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Plasma hydrogenation of strain-relaxed SiGe/Si heterostructure for layer transfer
Chen, Peng; Chu, Paul K.; Höchbauer, T.; Nastasi, M.; Buca, D.; Mantl, S.; Theodore, N. David; Alford, T.L.; Mayer, J. W.; Loo, Roger; Caymax, Matty; Cai, M.; Lau, S. (2004)