Browsing by author "Huatori, H."

Now showing items 1-1 of 1

    • Evaluation of Nb(Si)N as metal gate material 

      Van Hoornick, Nausikaa; De Witte, Hilde; Witters, Thomas; Zhao, Chao; Conard, Thierry; Huatori, H.; Swerts, Johan; Schram, Tom; Maes, Jan; De Gendt, Stefan; Heyns, Marc (2005)