Browsing by author "Mueller, Markus"
Now showing items 1-2 of 2
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Low VT metal-gate/high-k nMOSFETs - PBTI dependence and VT tune-ability on La/Dy-capping layer locations and laser annealing conditions
Chang, Shou-Zen; Hoffmann, Thomas Y.; Yu, HongYu; Aoulaiche, Marc; Rohr, Erika; Adelmann, Christoph; Kaczer, Ben; Delabie, Annelies; Favia, Paola; Van Elshocht, Sven; Kubicek, Stefan; Schram, Tom; Witters, Thomas; Ragnarsson, Lars-Ake; Wang, Xin Peng; Cho, Hag-Ju; Mueller, Markus; Chiarella, Thomas; Absil, Philippe; Biesemans, Serge (2008) -
N-type VT tuning by Te ion implantation in moly-based metal gates with high-k dielectric for fully depleted devices
Petry, Jasmine; Boccardi, Guillaume; Xiong, K.; Mueller, Markus; Hooker, Jacob; Singanamalla, Raghunath; Collaert, Nadine; De Meyer, Kristin (2008)