Publication:
N-type VT tuning by Te ion implantation in moly-based metal gates with high-k dielectric for fully depleted devices
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
2033 since deposited on 2021-10-17
2last month
1last week
Acq. date: 2026-01-09
Citations
Metrics
Views
2033 since deposited on 2021-10-17
2last month
1last week
Acq. date: 2026-01-09
Citations