Authors

Petry, Jasmine; Boccardi, Guillaume; Xiong, K.; Mueller, Markus; Hooker, Jacob; Singanamalla, Raghunath; Collaert, Nadine; De Meyer, Kristin

Conference

38th European Solid-State Device Research Conference - ESSDERC

Title

N-type VT tuning by Te ion implantation in moly-based metal gates with high-k dielectric for fully depleted devices

Publication type

Proceedings paper

Embargo date

9999-12-31