Publication:
N-type VT tuning by Te ion implantation in moly-based metal gates with high-k dielectric for fully depleted devices
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2036 since deposited on 2021-10-17
1last month
Acq. date: 2026-04-06
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2036 since deposited on 2021-10-17
1last month
Acq. date: 2026-04-06
Citations