Browsing by author "Archer, Leo"
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Selective single-wafer wet etching of Hf-based layers
Snow, Jim; Kraus, Harald; Kovacs, Fredi; Claes, Martine; Paraschiv, Vasile; Vos, Rita; Mertens, Paul; De Gendt, Stefan; Heyns, Marc; Archer, Leo (2005)