Browsing by author "Pret, Alessandro Vaglio"
Now showing items 1-2 of 2
-
A study of high NA EUV pattern stitching using rigorous stochastic lithography simulation
Robertson, Stewart; Schramm, Robert; Pret, Alessandro Vaglio; Wiaux, Vincent (2023) -
Evolution of lithography-to-etch bias in multi-patterning processes
Panneerchelvam, Prem; Agarwal, Ankur; Huard, Chad M. M.; Pret, Alessandro Vaglio; Mani, Antonio; Gronheid, Roel; Demand, Marc; Kumar, Kaushik; Paolillo, Sara; Lazzarino, Frederic (2022)