Browsing by author "He, Wei"
Now showing items 1-2 of 2
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Area-Selective Atomic Layer Deposition of TiN Using Trimethoxy(octadecyl)silane as a Passivation Layer
Zheng, Li; He, Wei; Spampinato, Valentina; Franquet, Alexis; Sergeant, Stefanie; De Gendt, Stefan; Armini, Silvia (2020) -
Hydroquinone oriented growth control to achieve high-quality copper coating at high rate for electronics interconnection
Zheng, Li; Wang, C.; Cai, D.; Huang, Y.; Adi, K.; Hong, Y.; Chen, Y.; Zhou, G.; Armini, Silvia; De Gendt, Stefan; Wang, Shouxu; He, Wei (2020)