Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
Hydroquinone oriented growth control to achieve high-quality copper coating at high rate for electronics interconnection
Publication:
Hydroquinone oriented growth control to achieve high-quality copper coating at high rate for electronics interconnection
Date
2020
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zheng, Li
;
Wang, C.
;
Cai, D.
;
Huang, Y.
;
Adi, K.
;
Hong, Y.
;
Chen, Y.
;
Zhou, G.
;
Armini, Silvia
;
De Gendt, Stefan
;
Wang, Shouxu
;
He, Wei
Journal
Journal of the Taiwan Institute of Chemical Engineers
Abstract
Description
Metrics
Views
1925
since deposited on 2021-10-29
408
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Views
1925
since deposited on 2021-10-29
408
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations