Publication:

Hydroquinone oriented growth control to achieve high-quality copper coating at high rate for electronics interconnection

Date

2020
Journal article
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Author(s)

Zheng, Li
;
Wang, C.
;
Cai, D.
;
Huang, Y.
;
Adi, K.
;
Hong, Y.
;
Chen, Y.
;
Zhou, G.
;
Armini, Silvia  
;
De Gendt, Stefan  
;
Wang, Shouxu
;
He, Wei

Journal

Journal of the Taiwan Institute of Chemical Engineers

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1929 since deposited on 2021-10-29
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Acq. date: 2026-02-24

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1929 since deposited on 2021-10-29
1last month
Acq. date: 2026-02-24

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