Hydroquinone oriented growth control to achieve high-quality copper coating at high rate for electronics interconnection

Zheng, Li; Wang, C.; Cai, D.; Huang, Y.; Adi, K.; Hong, Y.; Chen, Y.; Zhou, G.; Armini, Silvia; De Gendt, Stefan; Wang, Shouxu; He, Wei

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Hydroquinone oriented growth control to achieve high-quality copper coating at high rate for electronics interconnection

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2020

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Journal of the Taiwan Institute of Chemical Engineers

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Acq. date: 2026-05-09

Hydroquinone oriented growth control to achieve high-quality copper coating at high rate for electronics interconnection

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