Browsing by author "Friedemann, Michael"
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Enhanced growth and Cu diffusion barrier properties of thermal ALD TaNC films
Wojcik, Henry; Hossbach, Christoph; Kubasch, Christoph; Verdonck, Patrick; Barbarin, Yohan; Merkel, Ulrich; Bartha, Johann; Hubner, Rene; Engelmann, Hans-Jurgen; Friedemann, Michael (2013)