Browsing by author "Weidner, K."
Now showing items 1-2 of 2
-
Comparative study of PECVD SiOCH low-k films obtained at different deposition conditions
Shamiryan, Denis; Weidner, K.; Gray, W.D.; Baklanov, Mikhaïl; Vanhaelemeersch, Serge; Maex, Karen (2002) -
EFTEM as a porosity metrology tool for low-k dielectrics
Hens, S.; Bender, Hugo; Van Landuyt, J.; Iacopi, Francesca; Weidner, K.; Maex, Karen (2002)