Browsing by author "Zheng, Huifeng"
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The effects of VUV radiation on low-k organosilicate glass (SiCOH) as measured with electron-spin resonance
Xue, Panpan; Zheng, Huifeng; Li, Weiyi; de Marneffe, Jean-Francois; Baklanov, Mikhaïl; Afanasiev, Valeri; Nishi, Yoshio; Shohet, J.Leon (2015)