Browsing by author "Hamzik, James"

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Continuous improvements of defectivity rates in immersion photolithography via functionalized membranes in point-of-use photochemical filtration

D'Urzo, Lucia; Bayana, Hareen; Vandereyken, Jelle; Foubert, Philippe; Wu, Aiwen; Jaber, Jad; Hamzik, James (2017)