Browsing by author "Nye, Rachel"
Now showing items 1-7 of 7
-
A First-Principles Investigation of the Driving Forces Defining the Selectivity of TiO2 Atomic Layer Deposition
Kaneda, Yukio; Nye, Rachel; Marques, Esteban; Armini, Silvia; Delabie, Annelies; van Setten, Michiel; Pourtois, Geoffrey (2023) -
Aminosilane small molecule inhibitors for area-selective deposition: Study of substrate-inhibitor interfacial interactions
Van Dongen, Kaat; Nye, Rachel; Clerix, Jan-Willem; Sixt, Claudia; De Simone, Danilo; Delabie, Annelies (2023) -
Compatibility between polymethacrylate-based extreme ultraviolet resists and TiO(2 )area-selective deposition
Nye, Rachel; Van Dongen, Kaat; Oka, Hironori; De Simone, Danilo; Parsons, Gregory N. N.; Delabie, Annelies (2022) -
Enhancing Performance and Function of Polymethacrylate Extreme Ultraviolet Resists Using Area-Selective Deposition
Nye, Rachel; Van Dongen, Kaat; De Simone, Danilo; OKa, Hironori; Parsons, Gregory N.; Delabie, Annelies (2023) -
Improving polymethacrylate EUV resists with TiO2 area-selective deposition
Nye, Rachel; Van Dongen, Kaat; Oka, Hironori; Furutani, Hajime; Parsons, Gregory; De Simone, Danilo; Delabie, Annelies (2022) -
Mechanisms for undesired nucleation on H-terminated Si and dimethylamino-trimethylsilane passivated SiO2 during TiO2 area-selective atomic layer deposition
Nye, Rachel; Song, Seung Keun; Van Dongen, Kaat; Delabie, Annelies; Parsons, Gregory N. (2022) -
Quantified Uniformity and Selectivity of TiO2 Films in 45-nm Half Pitch Patterns Using Area-Selective Deposition Supercycles
Nye, Rachel; Van Dongen, Kaat; de Marneffe, Jean-Francois; Parsons, Gregory N. N.; Delabie, Annelies (2023)