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Quantified Uniformity and Selectivity of TiO2 Films in 45-nm Half Pitch Patterns Using Area-Selective Deposition Supercycles
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Authors
Nye, Rachel
;
Van Dongen, Kaat
;
de Marneffe, Jean-Francois
;
Parsons, Gregory N. N.
;
Delabie, Annelies
DOI
10.1002/admi.202300163
ISSN
2196-7350
Issue
20
Journal
ADVANCED MATERIALS INTERFACES
Volume
10
Title
Quantified Uniformity and Selectivity of TiO2 Films in 45-nm Half Pitch Patterns Using Area-Selective Deposition Supercycles
Publication type
Journal article
Embargo date
2023-07-17
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2
20.500.12860/42091.2
*
2023-12-15T09:49:24Z
validation by library/open access desk
1
20.500.12860/42091
2023-06-25T20:34:42Z
*Selected version
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