Publication:
Quantified Uniformity and Selectivity of TiO2 Films in 45-nm Half Pitch Patterns Using Area-Selective Deposition Supercycles
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Acq. date: 2026-09-16
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695 since deposited on 2023-06-25
18last month
1last week
Acq. date: 2026-09-16
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981 since deposited on 2023-06-25
Acq. date: 2026-09-16
Citations