Publication:
Quantified Uniformity and Selectivity of TiO2 Films in 45-nm Half Pitch Patterns Using Area-Selective Deposition Supercycles
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616 since deposited on 2023-06-25
11last month
8last week
Acq. date: 2026-07-15
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979 since deposited on 2023-06-25
Acq. date: 2026-07-15
Citations