Publication:
Quantified Uniformity and Selectivity of TiO2 Films in 45-nm Half Pitch Patterns Using Area-Selective Deposition Supercycles
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974 since deposited on 2023-06-25
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459 since deposited on 2023-06-25
64last month
19last week
Acq. date: 2025-12-15
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974 since deposited on 2023-06-25
Acq. date: 2025-12-15
Citations