Browsing by author "Parsons, Gregory N. N."
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Compatibility between polymethacrylate-based extreme ultraviolet resists and TiO(2 )area-selective deposition
Nye, Rachel; Van Dongen, Kaat; Oka, Hironori; De Simone, Danilo; Parsons, Gregory N. N.; Delabie, Annelies (2022) -
Quantified Uniformity and Selectivity of TiO2 Films in 45-nm Half Pitch Patterns Using Area-Selective Deposition Supercycles
Nye, Rachel; Van Dongen, Kaat; de Marneffe, Jean-Francois; Parsons, Gregory N. N.; Delabie, Annelies (2023)