Browsing by author "Knobloch, Joshua L."

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Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry

Tanksalvala, Michael; Porter, Christina L.; Esashi, Yuka; Wang, Bin; Jenkins, Nicholas W.; Zhang, Zhe; Miley, Galen P.; Knobloch, Joshua L.; McBennett, Brendan; Horiguchi, Naoto; Yazdi, Sadegh; Zhou, Jihan; Jacobs, Matthew N.; Bevis, Charles S.; Karl, Robert M., Jr.; Johnsen, Peter; Ren, David; Waller, Laura; Adams, Daniel E.; Cousin, Seth L.; Liao, Chen-Ting; Miao, Jianwei; Gerrity, Michael; Kapteyn, Henry C.; Murnane, Margaret M. (2021-01-27)