Browsing by author "De Backer, Eddy"

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Wafer bevel protection during deep reactive ion etching

Charavel, Remy; Roig, Jaime; Altamirano Sanchez, Efrain; Van Aelst, Joke; Devriendt, Katia; Van Wichelen, Koen; Gassot, Pierre; Coppens, Peter; De Backer, Eddy (2011)