Browsing by author "Fu, Yeh Sin"
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Improved resolution with main chain scission resists for EUV lithography
Shirotori, Akihide; Hoshino, Manabu; Rathore, Ashish; Fu, Yeh Sin; De Simone, Danilo; Vandenberghe, Geert; Matsumoto, Hirokazu (2022)