Browsing by author "Robinson, Alex"

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A Holistic Evaluation of Buried Power Rails and Back-Side Power for Sub-5 nm Technology Nodes

Nibhanupudi, S. S. Teja; Prasad, Divya; Das, Shidhartha; Zografos, Odysseas; Robinson, Alex; Gupta, Anshul; Spessot, Alessio; Debacker, Peter; Verkest, Diederik; Ryckaert, Julien; Hellings, Geert; Myers, James; Cline, Brian; Kulkarni, Jaydeep P. (2022-07-07)
Multi trigger resist for EUV lithography

Popescu, Carmen; Vesters, Yannick; McClelland, Alexandra; De Simone, Danilo; Dawson, Guy; Roth, John; Theis, Wolfgang; Vandenberghe, Geert; Robinson, Alex (2018)