Browsing by author "Amemiya, Fumihiro"
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Cleaning the high aspect ratio STI structures for advanced logic devices by implementation of a surface modification drying technique
Sebaai, Farid; Vereecke, Guy; Xu, XiuMei; Baudot, Sylvain; Amemiya, Fumihiro; Komori, Kana; Holsteyns, Frank (2018)